Generating extreme ultraviolet radiation with nanoscale antennas
US10785859B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Dec 19, 2018 |
| Grant date | Sep 22, 2020 |
| Priority date | — |
| Expiry date | Dec 19, 2038 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB82Y20/00
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
A method for generating extreme ultraviolet (EUV) radiation employs an EUV apparatus, which comprises one or more sets of nanoscale antennas, designed for electromagnetic field enhancement. The one or more sets comprise, each, at least one pair of opposite antennas separated by a feedgap volume. First cations of same molecular entities are allowed to reach the feedgap volumes and the antennas are energized so as to perform one or more EUV radiation emission cycles, during which the first cations are further ionized via electromagnetic field intensities achieved in the feedgap volumes by optically exciting corresponding pairs of opposite antennas. Second cations are thus obtained, which have a higher charge state than the first cations, and are forced to radiatively decay, by electrically stimulating antenna pairs, whereby EUV radiation is generated and third cations are obtained, which have a lower charge state than the second cations.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.