Double-frequency power-driven inductively coupled plasma torch, and apparatus for generating nanoparticle using same
US10785860B2 · kind B2 · utility
3Cited by
5References
14Claims
0Family size
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Key dates
| Filing date | Jun 23, 2016 |
| Grant date | Sep 22, 2020 |
| Priority date | — |
| Expiry date | Apr 3, 2037 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH05H1/4652
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
A dual frequency power-driven inductively coupled plasma torch according to an exemplary embodiment of the present invention includes: a hollow confinement tube provided with a space in which thermal plasma is formed; an induction coil that surrounds the confinement tube; and a power supply source that supplies power to the induction coil, wherein the power supply source may supply at least two powers having different frequencies to the induction coil.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.