Pump having an automated gas removal and fluid recovery system and method using a gas removal reservoir having an internal partition
US10786759B2 · kind B2 · utility
0Cited by
3References
4Claims
0Family size
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Key dates
| Filing date | Sep 27, 2018 |
| Grant date | Sep 29, 2020 |
| Priority date | — |
| Expiry date | Oct 9, 2038 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/49236
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
A precision pump system is described that includes a motor driver for accurately and repeatedly delivering process fluid, and uses a pumping fluid with minimal process fluid loss to a fabrication process. A method for automatically evacuating gas from the process fluid to be dispensed as part of a recirculation process is also described.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.