Defect detecting device, defect detecting method, and computer-readable recording medium
US10788320B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Aug 23, 2017 |
| Grant date | Sep 29, 2020 |
| Priority date | — |
| Expiry date | Aug 23, 2037 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG06T2207/30132
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A defect detecting device 10 includes an overall displacement measurement unit 11 that measures, based on observation data output from an observation device that observes a target object, a displacement of an overall movement of the target object relative to an observation point at set time intervals, as an overall displacement; a specific period detection unit 12 that detects a specific period in which the measured overall displacement is in a specific state within a period in which observation is performed; a partial displacement measurement unit 13 that measures, displacements at a plurality of points set on the target object in the detected specific period, as partial displacements; and a defect detection unit 14 that detects a defect in the target object, based on the acquired at least one of the temporal changes and the spatial distributions of the partial displacements.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.