Optical system for reference switching
US10788366B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Apr 13, 2017 |
| Grant date | Sep 29, 2020 |
| Priority date | — |
| Expiry date | Apr 13, 2037 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2021/4711
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Systems and methods for determining one or more properties of a sample are disclosed. The systems and methods disclosed can be capable of measuring along multiple locations and can reimage and resolve multiple optical paths within the sample. The system can be configured with one-layer or two-layers of optics suitable for a compact system. The optics can be simplified to reduce the number and complexity of the coated optical surfaces, etalon effects, manufacturing tolerance stack-up problems, and interference-based spectroscopic errors. The size, number, and placement of the optics can enable multiple simultaneous or non-simultanous measurements at various locations across and within the sample. Moreover, the systems can be configured with an optical spacer window located between the sample and the optics, and methods to account for changes in optical paths due to inclusion of the optical spacer window are disclosed.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.