Surface inspection apparatus and surface inspection method
US10788430B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jan 8, 2019 |
| Grant date | Sep 29, 2020 |
| Priority date | — |
| Expiry date | May 1, 2039 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG06T2207/30164
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A surface inspection apparatus includes: an inspection pattern forming unit that forms inspection patterns; a projection unit that projects the inspection patterns onto an inspection target object; a captured image acquiring unit that acquires captured images of the inspection target object; an edge extraction image creating unit that extracts edges from captured images, and creates edge extraction images; a correction coefficient setting unit that sets a correction coefficient for correcting intensities of edges in the edge extraction image; an intensity correcting unit that corrects the intensities of the edges; a corrected edge extraction image creating unit that creates corrected edge extraction images; an integrated image creating unit that creates a single integrated image by integrating the brightness values at the same position of the inspection target object; and a determination unit that determines the presence or absence of unevenness on a surface of the inspection target object.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.