Compact gas sensor with enhanced selectivity
US10788470B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Dec 22, 2016 |
| Grant date | Sep 29, 2020 |
| Priority date | — |
| Expiry date | Nov 26, 2037 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N33/0059
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A microelectromechanical gas sensor including a fixed part, at least one suspended part in relation to fixed part, at least one sensitive zone carried on the suspended part, the sensitive zone being able to adsorb/absorb and desorb gaseous species or families of gaseous species, a heater for heating at least the sensitive zone, a detector for detecting the adsorption/absorption and desorption of gaseous species or families of gaseous species on the sensitive zone, a controller of controlling the heater so that the heating is applied to at least the sensitive zone with one or more temperature profiles ensuring the adsorption/absorption and desorption of the gaseous species in a controlled manner so as to obtain an individual desorption of each species or families of gaseous species.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.