Light alignment control method and light alignment device
US10788716B2 · kind B2 · utility
1Cited by
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21Claims
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Key dates
| Filing date | Jun 29, 2017 |
| Grant date | Sep 29, 2020 |
| Priority date | — |
| Expiry date | Jun 29, 2037 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02F1/1337
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A photo-alignment control method and a photo-alignment apparatus are disclosed. In the photo-alignment control method, a yaw angle of a motion stage (130) relative to a polarizing illumination device (110) is detected to derive a weighted dynamic polarization angle deviation of a substrate (200), so that a rotational angle of a rotary table (120) for rotating a substrate (200) is controlled, thereby effectively improving a control accuracy of a polarization angle in the photo-alignment process and further to ensure an accuracy of an alignment angle formed in an alignment film.
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