Method and appliance for predicting the imaging result obtained with a mask when a lithography process is carried out

US10788748B2 · kind B2 · utility

Assignee

• Carl Zeiss SMT GmbH · DE

Inventors

• Thomas Thaler · Jena, DE
• Holger Seitz · Jena, DE
• Ute Buttgereit · Jena, DE
• Thomas Trautzsch · Oil City, US
• Mame Kouna Top-Diallo · Veldhoven, NL
• Christoph Husemann · Jena, DE

Key dates

• Filing date: Nov 21, 2018
• Grant date: Sep 29, 2020
• Expiry date: Nov 21, 2038

Classification

• Technology area (CPC G): Physics
• CPC primary: G03F7/705
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

The invention relates to a method and an appliance for predicting the imaging result obtained with a mask when a lithography process is carried out, wherein the mask comprises mask structures to be imaged and the mask is destined to be illuminated in a lithography process in a projection exposure apparatus with a predetermined illumination setting for exposing a wafer comprising a photoresist. In accordance with one aspect of the invention, a method according to the invention comprises the following steps: measuring at least one intensity distribution obtained for the mask in the case of an illumination with illumination light in accordance with the illumination setting in a mask inspection apparatus using a sensor arrangement, ascertaining an electric field resulting from the interaction of the illumination light with the mask structures, both in respect of amplitude and in respect of phase, by way of this intensity measurement, and estimating an intensity distribution obtained in the photoresist when the lithography process is carried out on the basis of a mathematical simulation (forward calculation), in which the electric field ascertained is propagated in a layer system compri…