Oriented piezoelectric film and method of manufacturing same, and liquid ejection head
US10790436B2 · kind B2 · utility
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9Claims
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Key dates
| Filing date | Jun 13, 2019 |
| Grant date | Sep 29, 2020 |
| Priority date | — |
| Expiry date | Jun 13, 2039 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC01P2004/03
- WIPO fieldMaterials, metallurgy
- WIPO sectorChemistry
Abstract
Provided is use of an oriented piezoelectric film including of a perovskite-type crystal represented by the following general formula (1): Ba1-xCaxTi1-yZryO3 (0≤x≤0.2, 0≤y≤0.2) (1). The oriented piezoelectric film is formed on an oriented underlayer oriented in a (111) plane and contains first crystals oriented in the (111) plane with respect to a film surface and randomly oriented second crystal grains. The first crystal grains have an average grain diameter of from 300 nm to 600 nm and the second crystal grains have an average grain diameter of from 50 nm to 200 nm.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.