Acoustic resonator and method of manufacturing the same
US10790797B2 · kind B2 · utility
1Cited by
4References
16Claims
0Family size
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Key dates
| Filing date | Sep 23, 2016 |
| Grant date | Sep 29, 2020 |
| Priority date | — |
| Expiry date | Oct 3, 2038 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10N30/88
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
An acoustic resonator includes: a substrate; a resonance part mounted on the substrate and including resonance part electrodes, the resonance part being configured to generate acoustic waves; a cavity disposed between the resonance part and the substrate; a frame part disposed on at least one electrode among the resonance part electrodes, and being configured to reflect the acoustic waves; and a connection electrode configured to connect the at least one electrode to an external electrode, and having a thickness less than a thickness of the at least one electrode.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.