Vacuum evaporation device and system
US10792688B2 · kind B2 · utility
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9Claims
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Key dates
| Filing date | Sep 19, 2017 |
| Grant date | Oct 6, 2020 |
| Priority date | — |
| Expiry date | Sep 10, 2038 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C14/243
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
A vacuum evaporation device and system comprises a material container and a recycling structure, wherein a nozzle is arranged on the upper end surface of the material container; the recycling structure is arranged around the nozzle; and the recycling structure is configured to receive material when the material sprayed from the nozzle is fallen down. By arranging the recycling structure, the deposited material is received when it is fallen down, so that the nozzle is prevented from being clogged by the fallen material.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.