Patent · US Active

Method for protecting a MEMS unit against infrared investigations and MEMS unit

US10793425B2 · kind B2 · utility

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0References

13Claims

0Family size

Assignee

Robert Bosch GmbH · DE

Inventors

Michael Curcic · Stuttgart, DE
Oliver Willers · Korb, DE
Sven Zinober · Friolzheim, DE
Ulrich Kunz · Stuttgart, DE

Key dates

Filing date	Mar 27, 2018
Grant date	Oct 6, 2020
Priority date	—
Expiry date	Jun 15, 2038

Classification

Technology area (CPC B)Performing Operations; Transporting
CPC primaryB81B2201/047
WIPO fieldOptics
WIPO sectorInstruments

Abstract

A method for protecting a MEMS unit, in particular a MEMS sensor, against infrared investigations, at least one area of the MEMS unit being doped, the at least one doped area absorbing, reflecting or diffusely scattering more than 50%, in particular more than 90%, of an infrared light incident upon it.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.