Apparatus for measuring the roughness of a workpiece surface

US10794678B2 · kind B2 · utility

Assignee

• Carl Zeiss Industrielle Messtechnik GmbH · DE

Inventors

• Kurt Brenner · Satteldorf, DE
• Philipp Mayinger · Aalen, DE
• Walter Jenisch · Heidenheim, DE
• Anton Fuchs · Bayreuth, DE
• Kai Bartel · Lorch, DE

Key dates

• Filing date: Feb 26, 2018
• Grant date: Oct 6, 2020
• Expiry date: Jul 24, 2038

Classification

• Technology area (CPC G): Physics
• CPC primary: G01Q60/38
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

An apparatus for measuring a surface of a workpiece has a multi-link articulated arm and a roughness sensor carried by the arm, which includes a sensing element linearly displaceable along an advance direction and elastically deflectable along a deflection direction, and which has a coupling link to connect it to a movable carrier of a coordinate measuring apparatus or of a robot. A first arm portion is rotatable relative to the coupling link about a first axis of rotation. A second arm portion is rotatable relative to the first arm portion about a second axis of rotation and arranged between the first and third arm portion which is rotatable relative to the second arm portion about a third axis of rotation, and to which the roughness sensor is fastened. The deflection direction is arranged parallel to the third axis while the sensing element is displaced linearly along the advance direction.