Device and method for sensor calibration
US10794728B2 · kind B2 · utility
1Cited by
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27Claims
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Key dates
| Filing date | Oct 30, 2017 |
| Grant date | Oct 6, 2020 |
| Priority date | — |
| Expiry date | Sep 26, 2038 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01D18/008
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A device and method for a MEMS device with at least one sensor is disclosed. A thermal element is disposed in the MEMS device to selectively adjust a temperature of the MEMS device. A calibration operation is initiated for the sensor to determine a correction value to be applied to the sensor measurement based on the temperature. The correction value is stored.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.