Patent · US Active

Micromirror device having a mechanical stop

US10795149B2 · kind B2 · utility

0Cited by

2References

5Claims

0Family size

Assignee

Robert Bosch GmbH · DE

Inventors

Helmut Grutzeck · Tübingen, DE
Peter Sudy · Reutlingen, DE
Andreas Finn · Dresden, DE
Daniel Maier · Stuttgart, DE

Key dates

Filing date	May 23, 2018
Grant date	Oct 6, 2020
Priority date	—
Expiry date	Jul 21, 2038

Classification

Technology area (CPC B)Performing Operations; Transporting
CPC primaryB81B2203/0163
WIPO fieldOptics
WIPO sectorInstruments

Abstract

A micromirror device having a cap, a function layer, and a window layer, which are disposed on top of one another and parallel to a main extension plane, the function layer being situated between the cap and the window layer, and a micromirror is patterned out of the function layer. The micromirror device has a stop, which is designed to restrict a deflection of the micromirror in a direction perpendicular to the main extension plane.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.