Diaphragm suppressing pressure sensor
US10801908B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Dec 8, 2016 |
| Grant date | Oct 13, 2020 |
| Priority date | — |
| Expiry date | Jul 6, 2037 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L23/22
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A pressure sensor including: a cylindrical casing extending in an axial direction; a diaphragm joined to the distal end side of the casing, extending in a direction intersecting the axis of the casing and deforming in accordance with pressure received on the distal end side; and a sensor section disposed inside the casing and outputting an electric signal corresponding to the deformation of the diaphragm. The diaphragm is provided with a plate-shaped base part and three or more protruding parts protruding from the distal end side surface of the base part toward the distal end side and set apart from each other. The relationships 0.05≤H≤2.5T and 0.05≤(S2/S1)≤0.8 are satisfied, where T (thickness), H (length), S1 (area of base distal end surface) and S2 (total area of protruding distal end surfaces) are as defined herein.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.