Patent · US Active

Reflective diffraction gratings employing efficiency enhancement or etch barrier layers

US10802184B2 · kind B2 · utility

2Cited by
36References
17Claims
0Family size

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Key dates

Filing dateApr 28, 2015
Grant dateOct 13, 2020
Priority date
Expiry dateApr 14, 2036

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG02B2005/1804
  • WIPO fieldOptics
  • WIPO sectorInstruments

Abstract

A diffraction grating comprises a substrate (with index nsub) with a surface facing an optical medium (with index nmed<nsub), a dielectric or semiconductor layer of thickness t on the substrate surface (with index nL≠nsub), and a set of diffractive elements on the layer (with index nR≠nmed). The diffractive elements comprise a set of ridges protruding into the optical medium, which fills trenches between the ridges, and are characterized by a spacing Λ, a width d, and a height h. Over an operational wavelength range, λ/2nsub<Λ<λ/(nsub+nmed). An optical signal incident on the diffractive elements from within the substrate at an incidence angle exceeding the critical angle, nsub, nmed, nL, nR, Λ, d, h, and t result in wavelength-dependent, first-order diffraction efficiency of the grating greater than a prescribed level over the operational wavelength range for both s- and p-polarized optical signals.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.