Patent · US Active

Electrostatic cleaning device

US10804127B2 · kind B2 · utility

0Cited by

3References

21Claims

0Family size

Inventors

Stephen P. Bathurst · Lafayette, US
John A. Higginson · Santa Clara, US
Dariusz Golda · Portola Valley, US
Hyeun-Su Kim · Suwon-si, KR

Key dates

Filing date	Mar 14, 2016
Grant date	Oct 13, 2020
Priority date	—
Expiry date	Sep 20, 2036

Classification

Technology area (CPC H)Electricity
CPC primaryH01L21/6833
WIPO fieldSemiconductors
WIPO sectorElectrical engineering

Abstract

An electrostatic cleaning device, mass transfer tool, and method of operation are disclosed. In an embodiment an electrostatic cleaning device includes a cleaning electrode area including a first electrode pattern, a first trace line connected to the first electrode pattern, and a dielectric layer covering the cleaning electrode and the first trace line. In an embodiment, a mass transfer tool includes a translatable transfer head assembly that is translatable over a carrier substrate stage, a receiving substrate stage, and an electrostatic cleaning stage.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.