Interposer with carbon nanofiber columns
US10804207B1 · kind B1 · utility
2Cited by
2References
14Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Jan 23, 2019 |
| Grant date | Oct 13, 2020 |
| Priority date | — |
| Expiry date | Jan 23, 2039 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10H20/833
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
Embodiments relate to the fabrication of an interposer with nanofibers by an additive process to electrically connect two or more electronic components. The nanofibers are grown on a substrate away from a surface of the substrate. The nanofibers are plated with a conductive material such that the nanofibers are encompassed in a column of the conductive material. An insulative material fills at least the volume between the columns of conductive material. The substrate and the interposer is the remaining device. The interposer can be combined with a redistribution layer to connect electronic components of dissimilar pitch.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.