Photonic degradation monitoring for semiconductor devices
US10804843B2 · kind B2 · utility
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20Claims
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Key dates
| Filing date | Mar 11, 2019 |
| Grant date | Oct 13, 2020 |
| Priority date | — |
| Expiry date | Apr 15, 2039 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02E10/50
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Methods of testing a semiconductor, and semiconductor testing apparatus, are described. In an example, a method for testing a semiconductor can include applying light on the semiconductor to induce photonic degradation. The method can also include receiving a photoluminescence measurement induced from the applied light from the semiconductor and monitoring the photonic degradation of the semiconductor from the photoluminescence measurement.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.