Patent · US Active

MEMS actuation systems and methods

US10807857B2 · kind B2 · utility

0Cited by

12References

17Claims

0Family size

Assignee

MEMS Drive, Inc. · US

Inventors

Xiaolei Liu · Los Angeles, US
Matthew Ng · Rosemead, US
Guiqin Wang · Arcadia, US
Gerardo Morabito · Arcadia, US

Key dates

Filing date	Sep 8, 2017
Grant date	Oct 20, 2020
Priority date	—
Expiry date	Dec 27, 2038

Classification

Technology area (CPC B)Performing Operations; Transporting
CPC primaryB81C2203/032
WIPO fieldAudio-visual technology
WIPO sectorElectrical engineering

Abstract

A micro-electrical-mechanical system (MEMS) cantilever assembly includes an intermediary cantilever portion, a main cantilever arm configured to couple a moveable portion of a micro-electrical-mechanical system (MEMS) and the intermediary cantilever portion, and a plurality of intermediary links configured to couple the intermediary cantilever portion to a portion of the micro-electrical-mechanical system (MEMS).

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.