Patent · US Active

MEMS actuator, system having a plurality of MEMS actuators, and method for producing a MEMS actuator

US10807859B2 · kind B2 · utility

1Cited by

4References

17Claims

0Family size

Assignee

Fraunhofer-Gesellschaft zur förderung der angewandten Forschung e.V. · DE

Inventors

Peter Duerr · Tokyo, JP
Detlef Kunze · Dresden, DE
Andreas Neudert · Dresden, DE
Martin Friedrichs · Dresden, DE

Key dates

Filing date	Jul 6, 2017
Grant date	Oct 20, 2020
Priority date	—
Expiry date	Jul 17, 2038

Classification

Technology area (CPC B)Performing Operations; Transporting
CPC primaryB81B2203/053
WIPO fieldOptics
WIPO sectorInstruments

Abstract

Embodiments of the present invention provide an MEMS actuator with a substrate, at least one post attached to the substrate and a deflectable actuator body that is connected to the at least one post via at least one spring, wherein, during electrostatic, electromagnetic or magnetic force application, the actuator body takes a second position starting from a first position by a tilt-free translational movement, wherein the first position and the second position are different, and wherein in a top view of the MEMS actuator the actuator body is arranged outside an area spanned by the at least one post.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.