Thin film sensor element for a resistance thermometer
US10809136B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Apr 12, 2017 |
| Grant date | Oct 20, 2020 |
| Priority date | — |
| Expiry date | Nov 6, 2037 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01C7/006
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The present disclosure relates to a thin film sensor element for determining and/or monitoring temperature. For this purpose, a resistive structure is provided, which is arranged in a resistive region on a substrate. The resistive structure is so formed that a first section of the resistive structure branches at a first reference point into two branches, and that a second section of the resistive structure branches at a second reference point into two other branches. In a contact region, the four branches are connected with four intermediate conductors in four contact areas, which are insulated from one another. In this way, the thin film sensor element is a real four conductor sensor element, wherein the reference points of the four conductor circuit lie within the resistive region. The resistance thermometer with the thin film sensor element of the invention is distinguished by a high accuracy.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.