Suspended grid structures for electrodes in vacuum electronics
US10811212B2 · kind B2 · utility
0Cited by
23References
40Claims
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Assignee
Inventors
Key dates
| Filing date | Aug 13, 2019 |
| Grant date | Oct 20, 2020 |
| Priority date | — |
| Expiry date | Aug 13, 2039 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2209/012
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
Disclosed embodiments include vacuum electronic devices and methods of fabricating a vacuum electronic device. In a non-limiting embodiment, a vacuum electronic device includes an electrode that defines discrete support structures therein. A first film layer is disposed on the electrode about a periphery of the electrode and on the support structures. A second film layer is disposed on the first film layer. The second film layer includes electrically conductive grid lines patterned therein that are supported by and suspended between the support structures.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.