Wafer container and method for holding wafer
US10811291B2 · kind B2 · utility
1Cited by
2References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 30, 2018 |
| Grant date | Oct 20, 2020 |
| Priority date | — |
| Expiry date | Apr 19, 2038 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2221/683
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
Provided is a wafer container including a frame and at least a pair of the stents. The frame has opposite sidewalls. The at least a pair of the stents is respectively disposed on the sidewalls of the frame, wherein the at least a pair of the stents is configured to provide at least three supporting points to support at least one wafer. A method for holding at least one wafer is also provided.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.