Cleaning system for a polishing film
US10814356B2 · kind B2 · utility
0Cited by
5References
20Claims
0Family size
Assignees
Inventors
Key dates
| Filing date | May 16, 2018 |
| Grant date | Oct 27, 2020 |
| Priority date | — |
| Expiry date | Sep 26, 2038 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB24B53/02
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
A cleaning system comprises a first cleaning tank, a carrying and moving unit, a first cleaning spray head, and a rolling brush unit. The carrying and moving unit is configured to move a polishing film to be cleaned into the first cleaning tank and hold the polishing film in the first cleaning tank. The first cleaning spray head is configured to spray a cleaning liquid on the polishing film held in the first cleaning tank. The rolling brush unit is configured to brush the polishing film while the first cleaning spray head sprays the cleaning liquid on the polishing film.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.