Shower head of combinatorial spatial atomic layer deposition apparatus
US10815569B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Feb 3, 2016 |
| Grant date | Oct 27, 2020 |
| Priority date | — |
| Expiry date | Jul 4, 2038 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC40B60/00
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A shower head of a combinatorial spatial atomic layer deposition (CS-ALD) apparatus may be provided. The shower head of the CS-ALD apparatus may include a plurality of shower blocks. Each of shower blocks may include a plurality of unit modules. Each of the shower blocks and each of the unit modules may be controlled independently from each other. Each of the plurality of unit modules may include a source gas injection nozzle, a purge gas injection nozzle, a reactant gas injection nozzle, and exhaust areas between the injection nozzles. The plurality of shower blocks may be separated from each other. Gas injection areas of the injection nozzles may be separated from the exhaust area.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.