Z axis accelerometer using variable vertical gaps
US10816569B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Sep 7, 2018 |
| Grant date | Oct 27, 2020 |
| Priority date | — |
| Expiry date | Mar 5, 2039 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01P2015/0831
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Z-axis microelectromechanical systems (MEMS) accelerometers are described. The z-axis MEMS accelerometers are of a teeter-totter type, having a pivoting beam suspended above a substrate. A non-uniform gap distance between the pivoting beam and the substrate is provided to increase the sensitivity of the accelerometer to z-axis acceleration. In some embodiments, the non-uniform gap distance is created by one or more substrate layers, such as one or more layers of polysilicon on the substrate above which the pivoting beam is suspended. In some embodiments, the non-uniform gap distance is created by the use of one or more bumps on the beam. In some embodiments, both substrate layers and bumps are used to provide a non-uniform gap distance for different electrodes of the accelerometer. The non-uniform gap distance may include a gap of reduced height, resulting in increased sensitivity of the accelerometer to z-axis accelerations.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.