Microchannel plate and electron multiplier tube with improved gain and suppressed deterioration
US10818484B2 · kind B2 · utility
0Cited by
5References
26Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 23, 2018 |
| Grant date | Oct 27, 2020 |
| Priority date | — |
| Expiry date | Jan 23, 2038 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/24435
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A microchannel plate is provided with a substrate including a front surface, a rear surface, and a side surface, a plurality of channels penetrating from the front surface to the rear surface of the substrate, a first film provided on at least an inner wall surface of the channel, a second film provided on at least a part of the first film, and electrode layers provided on the front surface and the rear surface of the substrate. The first film is made of MgO, the second film is made of SiO2, and the second film is thinner than the first film.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.