Patent · US Active

Semiconductor devices

US10818671B2 · kind B2 · utility

2Cited by
14References
17Claims
0Family size

Assignee

Inventors

Key dates

Filing dateSep 18, 2018
Grant dateOct 27, 2020
Priority date
Expiry dateSep 18, 2038

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH10B12/36
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

A semiconductor device includes a plurality of conductive structures arranged on a substrate and spaced apart from each other in a second direction substantially perpendicular to a first direction, in which each of the plurality of conductive structures extends in the first direction. A plurality of contact structures are arranged between the conductive structures in an alternating arrangement and spaced apart from each other in the first direction. A plurality of insulation structures are arranged in a space between the conductive structures and between the contact structures. A plurality of air spacers are arranged between the alternating arrangement of the plurality of conductive structures and the plurality of contact structures, respectively and spaced apart from each other in the first direction.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.