Process for fabricating a piezoelectric nanogenerator, piezoelectric nanogenerator obtained by this process and device including such a piezoelectric nanogenerator
US10818836B2 · kind B2 · utility
Assignees
Inventors
Key dates
| Filing date | May 18, 2016 |
| Grant date | Oct 27, 2020 |
| Priority date | — |
| Expiry date | Aug 13, 2037 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10N19/00
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
The invention relates to a process for fabricating a piezoelectric nanogenerator, to a piezoelectric nanogenerator obtained by this process and to a device including such a piezoelectric nanogenerator connected to a capacitor, said process comprising the following steps: a) providing a membrane (100) made of polarised β-PVDF or polarised P(VDF-TrFe) copolymer and therefore having piezoelectric properties, said membrane (100) moreover having two external major faces (11, 12) that are separated by a membrane thickness (e); b) irradiating the entirety of the thickness of said membrane (100), via at least one of its two external major faces (11, 12), with heavy ions having a fluence of between 103 ions/cm2 and 1010 ions/cm2, as a result of which a membrane (101) containing latent traces (TL) of the passage of the heavy ions through the entirety of its thickness is obtained; c) revealing the latent traces (TL) using a chemical process of length that is preset so as to preserve a defect zone (ZD) belonging to the latent trace, as a result of which a nanostructured membrane is obtained having nanopores including, around each nanopore, a defect zone (ZD); d) depositing a layer of an electr…
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.