Microelectronic module for cleaning a surface, module array, and method for cleaning a surface

US10821486B2 · kind B2 · utility

Assignees

• Airbus Defence and Space GmbH · DE
• AIRBUS OPERATIONS LIMITED · DE

Inventors

• Ralf CASPARI · Kösching, DE
• Robert WEICHWALD · Siegenburg, DE
• Emanuel ERMANN · Oberstimm, DE
• Gerd Heller · Hamburg, DE

Key dates

• Filing date: Nov 4, 2016
• Grant date: Nov 3, 2020
• Expiry date: Dec 5, 2036

Classification

• Technology area (CPC B): Performing Operations; Transporting
• CPC primary: B64D27/353
• WIPO field: Transport
• WIPO sector: Mechanical engineering

Abstract

A microelectronic module for cleaning a surface is described. The microelectronic module comprises at least one voltage converter for converting a provided first voltage into a higher, lower, or identical second voltage. The module also comprises at least one actuator. The actuator comprises at least one generator for generating an ionic current, an electrical plasma, harmonic components and/or an electrostatic field from the second voltage which is provided by the voltage converter. At least the voltage converter and the actuator are disposed on a thin-film, planar substrate. At least most of at least one object adhering to the surface is removed by the actuator.