Lithium-containing transition metal oxide target
US10822690B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Mar 17, 2016 |
| Grant date | Nov 3, 2020 |
| Priority date | — |
| Expiry date | Jun 2, 2037 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02E60/10
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A process for the formation of an LiM02 (e.g., LiCoO2) sputtering target with a bi-modal grain size distribution (as in a hollow cylinder target body) that includes a CIP-based process involving, for example, forming or sourcing an LiMO2 (e.g., Li—CoO2) powder; dispersion and milling (e.g., wet milling); binder introduction; drying (e.g., spray drying) to form a granulate; CIP processing of the granulate into a molded shape; and a heating cycle for debinding and sintering to form a densified sintered shape. The target body produced is suited for inclusion on a sputtering target assembly (as in a rotary sputtering target assembly with a plurality of cylindrical target bodies attached to a backing support). The invention is inclusive of the resultant target bodies formed under the CIP based process as well as an induction heater based process for attachment (e.g., metal solder bonding) of the low conductivity target body(ies) of LiMO2 (e.g., LiCoO2) to a common backing support through use of an added conductive wrap or layer provided to the target body and heated with the induction heater during the attachment process.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.