Multiple axis sensing device based on frequency modulation and method of operation
US10823569B1 · kind B1 · utility
Assignee
Inventor
Key dates
| Filing date | Aug 22, 2019 |
| Grant date | Nov 3, 2020 |
| Priority date | — |
| Expiry date | Aug 22, 2039 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03H9/2447
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A MEMS device includes a first inertial mass system having first drive and sense masses elastically coupled to one another and a second inertial mass system having second drive and sense masses elastically coupled to one another. The first and second drive masses undergo antiphase drive motion along a first axis parallel to the surface of the substrate. First and second sense springs anchor and suspend first and second sense masses spaced apart from the surface of the substrate. The first and second sense springs enable antiphase sense motion of the first and second sense masses along a second axis parallel to the surface in response to an angular rotation about a third axis perpendicular to the surface. The first and second sense springs further enable in-phase sense motion of the first and second sense masses along the second axis in response to a linear acceleration along the second axis.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.