X-ray inspection method and X-ray inspection device
US10823686B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | May 13, 2016 |
| Grant date | Nov 3, 2020 |
| Priority date | — |
| Expiry date | Feb 16, 2037 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2223/60
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Detection can be performed even for a thick inspection target object through time delay integration without degradation of spatial resolution. There is provided an X-ray inspection device configured to include: an X-ray source that generates X-rays; a transport unit that performs transporting a sample; a detecting unit that has a time delay integration type detector which detects X-rays generated by the X-ray source and transmitted through the sample transported by the transport unit; and a defect determining unit that processes a signal obtained by detecting the X-rays transmitted through the sample by the time delay integration type detector of the detecting unit and determines a defect in the sample. The transport unit performs transporting the sample while causing the sample to rotate in synchronization with the transporting when the sample passes in front of the time delay integration type detector of the detecting unit.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.