Nanograting method and apparatus

US10823894B2 · kind B2 · utility

Assignee

• Magic Leap, Inc. · US

Inventors

• Christophe Peroz · San Francisco, US
• Mauro Melli · San Leandro, US
• Vikramjit Singh · Pflugerville, US
• David Jurbergs · Fort Worth, US
• Jeffrey Dean Schmulen · Austin, US
• Zongxing Wang · Austin, US
• Shuqiang Yang · Austin, US
• Frank Y. Xu · Round Rock, US
• Kang Luo · Austin, US
• Marlon Edward Menezes · Austin, US
• Michael Nevin Miller · Austin, US

Key dates

• Filing date: Oct 8, 2019
• Grant date: Nov 3, 2020
• Expiry date: Oct 8, 2039

Classification

• Technology area (CPC H): Electricity
• CPC primary: H04N9/3144
• WIPO field: Audio-visual technology
• WIPO sector: Electrical engineering

Abstract

A method of manufacturing a waveguide having a combination of a binary grating structure and a blazed grating structure includes cutting a substrate off-axis, depositing a first layer on the substrate, and depositing a resist layer on the first layer. The resist layer includes a pattern. The method also includes etching the first layer in the pattern using the resist layer as a mask. The pattern includes a first region and a second region. The method further includes creating the binary grating structure in the substrate in the second region and creating the blazed grating structure in the substrate in the first region.