Device for detecting electromagnetic radiation having an encapsulating structure including at least one interference filter
US10825936B2 · kind B2 · utility
2Cited by
3References
18Claims
0Family size
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Key dates
| Filing date | Apr 24, 2017 |
| Grant date | Nov 3, 2020 |
| Priority date | — |
| Expiry date | Jul 25, 2037 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01J3/0256
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A device for detecting electromagnetic radiation includes at least one thermal detector, placed on a substrate; an encapsulating structure forming a cavity housing the thermal detector, including at least one thin encapsulating layer; and at least one Fabry-Perot interference filter, formed by first and second semi-reflective mirrors that are separated from each other by a structured layer. A high-index layer of one of the semi-reflective mirrors is at least partially formed from the thin encapsulating layer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.