Patent · US Active

Method of producing differently doped zones in a silicon substrate, in particular for a solar cell

US10825945B2 · kind B2 · utility

0Cited by
3References
14Claims
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Assignee

Inventors

Key dates

Filing dateJun 29, 2015
Grant dateNov 3, 2020
Priority date
Expiry dateSep 15, 2036

Classification

  • Technology area (CPC Y)Emerging Cross-Sectional Technologies
  • CPC primaryY02P70/50
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

What is proposed is a method of producing at least two differently heavily doped subzones (3, 5) predominantly doped with a first dopant type in a silicon substrate (1), in particular for a solar cell. The method comprises: The method uses the observation that a borosilicate glass layer seems to promote an in-diffusion of phosphorus from a gas atmosphere and may substantially facilitate a manufacturing for example of solar cells, in particular back contact solar cells.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.