Piezoelectric micro-electro-mechanical systems (MEMS) device with a beam strengthening physical element
US10825982B1 · kind B1 · utility
15Cited by
9References
19Claims
0Family size
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Key dates
| Filing date | Sep 11, 2015 |
| Grant date | Nov 3, 2020 |
| Priority date | — |
| Expiry date | Jun 1, 2038 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH04R2201/003
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
A piezoelectric Micro-Electro-Mechanical Systems (MEMS) device comprising: a physical element; and a piezoelectric sensor element, with the physical element positioned in proximity to a moving portion of the piezoelectric sensor element, and with proximity of the physical element to the moving portion reducing a probability of breakage of the piezoelectric sensor element by limiting an excursion of the piezoelectric sensor element, relative to a probability of breakage of the piezoelectric sensor element in another piezoelectric MEMS device without the physical element.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.