Acoustic wave device
US10826461B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jun 14, 2017 |
| Grant date | Nov 3, 2020 |
| Priority date | — |
| Expiry date | Jun 6, 2039 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03H9/64
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
An acoustic wave device includes: a piezoelectric substrate; a comb-shaped electrode located on the piezoelectric substrate; a pair of reflectors located on the piezoelectric substrate, the pair of reflectors sandwiching the comb-shaped electrode; a first dielectric film located on the piezoelectric substrate, the first dielectric film covering the pair of reflectors and having side surfaces in regions between the comb-shaped electrode and the pair of reflectors; and a second dielectric film located on the piezoelectric substrate, the second dielectric film covering the comb-shaped electrode and being in contact with the side surfaces of the first dielectric film.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.