Transversely-excited film bulk acoustic resonators with molybdenum conductors
US10826462B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jan 31, 2020 |
| Grant date | Nov 3, 2020 |
| Priority date | — |
| Expiry date | Jan 31, 2040 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03H9/547
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
There is disclosed acoustic resonators and filter devices. An acoustic resonator includes a substrate having a surface and a single-crystal piezoelectric plate having front and back surfaces, the back surface attached to the surface of the substrate except for a portion of the piezoelectric plate forming a diaphragm that spans a cavity in the substrate. An interdigital transducer (IDT) is formed on the front surface of the single-crystal piezoelectric plate such that interleaved fingers of the IDT are disposed on the diaphragm. The interleaved fingers of the IDT are substantially molybdenum. The piezoelectric plate and the IDT are configured such that a radio frequency signal applied to the IDT excites a primary shear acoustic mode in the diaphragm. A thickness of the interleaved fingers of the IDT is between 0.25 times and 2.5 times a thickness of the piezoelectric plate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.