Mask plate and method for fabricating the same
US10829847B2 · kind B2 · utility
Assignees
Inventors
Key dates
| Filing date | Aug 31, 2018 |
| Grant date | Nov 10, 2020 |
| Priority date | — |
| Expiry date | Feb 8, 2039 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10K71/166
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A mask plate and a method for fabricating the same are disclosed. The mask plate includes a frame, mask strips fixed to the frame and extending in a first direction, and shielding strips having a same extending direction as that of the mask strips. The shielding strips are arranged in space between neighboring mask strips and shield a gap between neighboring mask strips. Each shielding strip includes a first border parallel with the first direction. Each shielding strip is provided with a first location hole at both ends of its extending direction. Some or all of the shielding strips have widths in a direction perpendicular to the first direction which are different from one another. Distances between centers of the first location holes of each shielding strip and the first border of the shielding strips lie in a first threshold range.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.