Evaporation source and evaporation-deposition device having the same
US10829850B2 · kind B2 · utility
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18Claims
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Key dates
| Filing date | Apr 25, 2018 |
| Grant date | Nov 10, 2020 |
| Priority date | — |
| Expiry date | Jan 3, 2039 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC30B35/00
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
The disclosure provides an evaporation source, comprising: a crucible body, having a first surface; and a crucible upper-lid, having a second surface in contact with the first surface in use, wherein one of the first surface and the second surface is provided with a convex portion and the other is provided with a concave portion capable of being engaged with the convex portion. The disclosure also provides an evaporation-deposition device having the evaporation source.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.