Wafer carrier and method
US10829866B2 · kind B2 · utility
0Cited by
11References
7Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 3, 2017 |
| Grant date | Nov 10, 2020 |
| Priority date | — |
| Expiry date | Apr 25, 2037 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2223/54493
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
In an embodiment, a wafer carrier includes a pocket sized and shaped to accommodate a wafer, the pocket being defined by a base and a substantially circular perimeter including an inner face and an outer face. The substantially circular perimeter includes a notch in the inner face.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.