High-speed metrology
US10830578B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Oct 17, 2019 |
| Grant date | Nov 10, 2020 |
| Priority date | — |
| Expiry date | Oct 17, 2039 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B2290/65
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method and an apparatus are directed to characterizing a continuously moving 3D object via interferometry-based scanning. The method includes repeatedly forming several depth characterizations of the 3D object along respective scan lines of a plurality of scan lines on the surface of the 3D object. During this scanning, the 3D object is undergoing its continuous motion. The method further includes combining the determined depth characterization along the scan lines of the plurality of scan lines to form a depth map representing at least a depth of a portion associated with a location on the surface of the 3D object in the third direction on a grid of locations arranged in the first and second directions. Forming the depth characterizations includes scanning a frequency-dispersed pulsed optical signal in a first direction across the continuously moving 3D object, said 3D object moving in a second direction substantially orthogonal to the first direction. The scanned optical signal forming scan lines on a surface of the 3D object in a third direction substantially orthogonal to the first direction and the second direction.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.