Inspection system, inspection method, and storage medium
US10830708B2 · kind B2 · utility
Assignees
Inventor
Key dates
| Filing date | Aug 14, 2018 |
| Grant date | Nov 10, 2020 |
| Priority date | — |
| Expiry date | Mar 28, 2039 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N21/9505
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
According to one embodiment, an inspection system includes a holder, an irradiation part, a detector, and a controller. The irradiation part irradiates a first light toward a surface of a substrate held on the holder. The detector detects an intensity of a second light generated by reflection or scattering of the first light. The controller sets a first intensity range corresponding to an intensity of light reflected or scattered by a region not including slip of the surface. The controller sets a second intensity range corresponding to an intensity of light reflected or scattered by the slip. An upper limit and a lower limit of the second intensity range each are larger than an upper limit of the first intensity range. The controller extracts, as a length of the slip, a length of a region where the intensity of the second light is included in the second intensity range.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.