Carrier apparatus and methods of processing a carrier apparatus
US10836674B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 21, 2018 |
| Grant date | Nov 17, 2020 |
| Priority date | — |
| Expiry date | Mar 21, 2038 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC03C2218/33
- WIPO fieldMaterials, metallurgy
- WIPO sectorChemistry
Abstract
A carrier apparatus includes an article including a first major surface, a second major surface, a thickness between the first major surface and the second major surface, and an outer edge extending across the thickness between the first major surface and the second major surface. The carrier apparatus includes a coating including a central portion disposed on the first major surface of the article and an outer exposed portion disposed on the outer edge of the article, and a gasket including a first surface contacting the coating. An outer interface between the first surface of the gasket and the coating defines an outer boundary isolating the central portion of the coating from the outer exposed portion of the coating. Methods of processing a carrier apparatus to remove at least a portion of the coating from the article are also provided.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.