Surface measurement by means of excited fluorescence
US10837770B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jun 15, 2019 |
| Grant date | Nov 17, 2020 |
| Priority date | — |
| Expiry date | Jun 15, 2039 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B11/005
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A measuring device for measuring an object. The measuring device includes a distance measuring unit having a beam emission unit generating a measurement radiation having a defined wavelength spectrum and a detector detecting the measurement radiation reflected on the object surface, the detector having at least one first sensor. The distance measuring unit generates distance measured data and reflection measured data as first distance measured data by emitting the measurement radiation and detecting the reflected measurement radiation according to the principle of triangulation. The measurement radiation is generated using a wavelength spectrum such that a fluorescence is excitable by an interaction of the measurement radiation with the object material to emit fluorescent light, wherein a spectrum of the fluorescent light and the wavelength spectrum of the measurement radiation are different.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.