Method for operating a rotation rate sensor using different frequencies
US10837776B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Aug 24, 2017 |
| Grant date | Nov 17, 2020 |
| Priority date | — |
| Expiry date | Dec 26, 2038 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01C19/5747
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method for operating a micromechanical component (a rotation rate sensor), in which a first AC electrical voltage, having a first frequency, is applied to a drive-electrode so that an oscillation apparatus is deflected parallel to a deflection direction by the drive-electrode; a second AC electrical voltage, having a second frequency, is applied to a detection-electrode so that a force effect on the oscillation apparatus perpendicularly to the detection direction is detected by the drive-electrode, a third AC electrical voltage, having a third frequency differing from the first, is applied to the drive-electrode so that a deflection of the oscillation apparatus parallel to the deflection direction is detected by the drive-electrode; and/or that a fourth AC electrical voltage, having a fourth frequency differing from the second, is applied to the detection-electrode to exert a further force effect, opposite to the force effect, on the oscillation apparatus.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.